HERMOVAC Sensor
Technical Data
TM 100
Measurement principle Piezo-resistive （gas-type independent） and thermal conductance Pirani
Indicated units of measurement mbar, Torr, microns, Pa
Measurement range mbar （Torr） 1200 to 5 x 10-4 （900 to 3.75 x 10-4）
Maximum overload bar abs. 2
Measurement uncertainty with reference to
full-scale value （at 1200 - 10 mbar） % 0.4 （full-scale）
measured value （at 10 to 0.01 mbar） % 10 （full-scale）
Materials in contact with the vacuum Stainless steel, gold, tungsten, nickel, glass, Viton
Measurement cycle s 1.6
Settling time ms 400
Operating temperature °C +5 to +50
Storage temperature °C -20 to +60
Supply voltage Rechargeable 9 V battery （type 6LR61） or
12 V AC adaptor （miniature jack, + terminal at the tip）
Power consumption, approx. mW 110 （pulse）
Operating duration
Li battery h < 100
6LR61 alkaline h < 40
Display LCD 12 mm
Connection DN 16 KF
Dimensions （without flange） mm 60 x 120 x 25
Protection class IP 40
Weight （including battery） kg （lbs） 0.23 （0.51）
THERMOVAC Sensor
Ordering Information
TM 100
TM 100, DN 16 KF Part No. 230 080
Oerlikon Leybold Vacuum Full Line Catalog 17 C16
